7 results
Atomistic Simulation and Subsequent Optimization of Boron USJ Using Pre-Amorphization and High Ramp Rates Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E05-08
- Print publication:
- 2008
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Modeling and Simulation of the Influence of SOI Structure on Damage Evolution and Ultra-shallow Junction Formed by Ge Preamorphization Implants and Solid Phase Epitaxial Regrowth
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- Journal:
- MRS Online Proceedings Library Archive / Volume 912 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0912-C03-04
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- 2006
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Simulation of Defects and Diffusion Phenomena in Silicon
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- Journal:
- MRS Bulletin / Volume 25 / Issue 6 / June 2000
- Published online by Cambridge University Press:
- 31 January 2011, pp. 45-50
- Print publication:
- June 2000
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Atomistic Modeling of Complex Silicon Processing Scenarios
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B11.1
- Print publication:
- 2000
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Ostwald Ripening of {113} Defects Precursors and Transient Enhanced Diffusion
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- Journal:
- MRS Online Proceedings Library Archive / Volume 568 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 163
- Print publication:
- 1999
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Atomistic Modeling of Point and Extended Defects in Crystalline Materials
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- Journal:
- MRS Online Proceedings Library Archive / Volume 532 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 43
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- 1998
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Monte Carlo Atomistic Simulation of Polycrystalline Aluminum Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 514 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 127
- Print publication:
- 1998
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